Plasma etching method and plasma etching apparatus

Assignee

• Tokyo Electron Limited

Inventors

• Koichi Nagami (40 patents)
• Kazunobu Fujiwara (14 patents)
• Tatsuro Ohshita (12 patents)
• Takashi Dokan (17 patents)
• Koji Maruyama (72 patents)
• Kazuya Nagaseki (71 patents)
• Shinji Himori (54 patents)

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