Substrate processing apparatus and apparatus for manufacturing integrated circuit device

Assignee

• Samsung

Inventors

• Young-Hoo Kim (35 patents)
• Sang-Jine Park (34 patents)
• Yong-Jhin Cho (21 patents)
• Yeon-Jin Gil (5 patents)
• Ji Hoon Jeong (39 patents)
• Byung-Kwon Cho (18 patents)
• Yong-Sun Ko (62 patents)
• Kun-Tack Lee (56 patents)

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