Pumping apparatus, treatment solution supplying device, substrate treating apparatus, liquid draining method, and liquid replacing method

Assignee

• Screen Holdings Co.

Inventors

• Junki Nishimura (4 patents)
• Hiroyuki Ogura (60 patents)
• Masahito KASHIYAMA (17 patents)
• Toru Momma (12 patents)
• Shoji Kirita (5 patents)
• Hidetoshi Sagawa (6 patents)
• Shogo Yoshida (18 patents)

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