Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Wafer level integrated MEMS device enabled by silicon pillar and smart cap

Wafer level integrated MEMS device enabled by silicon pillar and smart cap

US Patent 10899608 · Granted Jan 26, 2021

Estimated economic value: $162,756,000 ⓘ

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Method and system for failure predication of cooling fan2025
Bookcase2025
Pharmaceutically acceptable acid salt of free base of GLP1 receptor agonist, and2025
Semiconductor device and method of manufacture2025
Biosensor system with integrated microneedle2025
Method and system for detecting semiconductor device2025
Method and system for detecting semiconductor device2025
Method and system for detecting semiconductor device2025
Semiconductor device comprising different types of microelectromechanical system2025
Composition comprising three alkanolamines and a hydroxylamine for removing etch2025
Plush toy2025
Toy2025