Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Substrate processing apparatus and substrate processing method using the same

Substrate processing apparatus and substrate processing method using the same

US Patent 10793949 · Granted Oct 6, 2020

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Semiconductor device manufacturing method2025
Substrate processing apparatus2025
Direction changeable seat with movable seatbelt fixing position for vehicle2025
Preparation process of 5-ethylidene-2-norbornene2025
Standalone precursor for synthesizing nanomaterials and apparatus for synthesizi2025
Measurement and control of respiration of perishable commodities in low absolute2025
Batch type substrate processing apparatus2025
Substrate support assembly and substrate processing apparatus2025
Substrate support assembly and substrate processing apparatus2025
Substrate support assembly and substrate processing apparatus2025
X-ray tube2024
Portable air purifier2024