Aromatic resins for underlayers

Assignee

• Rohm And Haas Electronic Materials

Inventors

• Shintaro Yamada (40 patents)
• Li Cui (24 patents)
• Christopher Gilmore (14 patents)
• Joshua Kaitz (8 patents)
• Sheng Liu (12 patents)
• James F. Cameron (88 patents)
• Suzanne M. Coley (38 patents)

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