Microelectromechanical device, method for manufacturing a microelectromechanical device, and method for manufacturing a system on chip using a CMOS process

Assignee

• Infineon Technologies Dresden

Inventors

• Thoralf Kautzsch (88 patents)
• Steffen Bieselt (36 patents)
• Heiko Froehlich (30 patents)
• Andre Roeth (12 patents)
• Maik Stegemann (35 patents)
• Mirko Vogt (41 patents)

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