Process compatibility improvement by fill factor modulation

Assignee

• Kla-Tencor

Inventors

• Vladimir Levinski (96 patents)
• Unknown
• Tal Itzkovich (8 patents)
• Sharon Aharon (5 patents)
• Unknown
• Yuri Paskover (30 patents)
• Unknown
• Unknown
• Amnon Manassen (113 patents)
• Myungjun Lee (27 patents)
• Mark D. Smith (27 patents)

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