Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Method of optimizing the position and/or size of a measurement illumination spot relative to a target on a substrate, and associated apparatus

Method of optimizing the position and/or size of a measurement illumination spot relative to a target on a substrate, and associated apparatus

US Patent 10488765 · Granted Nov 26, 2019

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Wavelength selection module, illumination system and metrology system2025
Measuring method and measuring apparatus2025
Method for thermo-mechanical control of a heat sensitive element and device for 2025
Method and apparatus for calculating a spatial map associated with a component2025
Reflector manufacturing method and associated reflector2025
Stage anti-fretting mechanism for roller bearing lifetime improvement2025
Object holder, electrostatic sheet and method for making an electrostatic sheet2025
Object holder, tool and method of manufacturing an object holder2025
Manufacturing a reflective diffraction grating2024
Actuator device for use in a positioning system as well as such positioning syst2024
Metrology apparatus2024
Wavefront sensor and associated metrology apparatus2023