Dark-field inspection using a low-noise sensor

Assignee

• Kla-Tencor

Inventors

• Yung-Ho Alex Chuang (163 patents)
• David L. Brown (52 patents)
• Devis Contarato (6 patents)
• John Fielden (148 patents)
• Daniel Kavaldjiev (33 patents)
• Guoheng Zhao (92 patents)
• Jehn-Huar Chern (16 patents)
• Guowu Zheng (9 patents)
• Donald Pettibone (20 patents)
• Stephen Biellak (36 patents)

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