Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Method of controlling ion energy distribution using a pulse generator with a current-return output stage

Method of controlling ion energy distribution using a pulse generator with a current-return output stage

US Patent 10448495 · Granted Oct 15, 2019

Estimated economic value: $25,920,000 ⓘ

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Apparatus and method for delivering a plurality of waveform signals during plasm2025
Plasma processing chambers configured for tunable substrate and edge sheath cont2025
Systems and methods for controlling a voltage waveform at a substrate during pla2025
Systems and methods for controlling a voltage waveform at a substrate during pla2025
Systems and methods for controlling a voltage waveform at a substrate during pla2025
Systems and methods for controlling a voltage waveform at a substrate during pla2025
Systems and methods for controlling a voltage waveform at a substrate during pla2025
Apparatus and method for controlling edge ring variation2025
Apparatus and method for controlling edge ring variation2025
Condition selectable backside gas2025
Plasma uniformity control in pulsed DC plasma chamber2025
Database table restoration for data with skewed distribution2025