Lithographic apparatus, method of transferring a substrate and device manufacturing method

Assignee

• Asml Netherlands B.V.

Inventors

• Aart Adrianus Van Beuzekom (6 patents)
• Jozef Augustinus Maria Alberti (6 patents)
• Hubert Marie Segers (9 patents)
• Ronald Van Der Ham (34 patents)
• Francis Fahrni (5 patents)
• Ruud Olieslagers (11 patents)
• Gerben Pieterse (17 patents)
• Cornelius Maria Rops (36 patents)
• Pepijn Van Den Eijnden (5 patents)
• Paul Van Dongen (5 patents)
• Bas Willems (2 patents)

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