Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Substrate holder, carrier system comprising a substrate holder and lithographic apparatus

Substrate holder, carrier system comprising a substrate holder and lithographic apparatus

US Patent 12399436 · Granted Aug 26, 2025

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Method of determining a mark measurement sequence, stage apparatus and lithograp2025
Height measurement method and height measurement system2025
Apparatus and method for measuring substrate height2023
Elastic guiding device, positioning device, blade and lithographic apparatus2022
Lithographic apparatus and method2022
Positioning system and lithographic apparatus2021
Lithographic apparatus, method of transferring a substrate and device manufactur2021
Substrate support, method for loading a substrate on a substrate support locatio2020
Apparatus for delivering gas and illumination source for generating high harmoni2020
Apparatus for delivering gas and illumination source for generating high harmoni2020
Lithographic apparatus, method of transferring a substrate and device manufactur2019
Patient interface assembly with improved stabilization2017