Etching method for SiC substrate and holding container

Assignee

• Toyo Tanso Co.
• Kwansei Gakuin Educational Foundation

Inventors

• Satoshi Torimi (14 patents)
• Masato Shinohara (6 patents)
• Youji Teramoto (3 patents)
• Norihito Yabuki (8 patents)
• Satoru Nogami (32 patents)
• Tadaaki Kaneko (44 patents)
• Koji Ashida (15 patents)
• Yasunori Kutsuma (17 patents)

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