Issued Patents All Time
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11261539 | Method for manufacturing reformed sic wafer, epitaxial layer-attached sic wafer, method for manufacturing same, and surface treatment method | Satoshi Torimi, Yusuke Sudo, Youji Teramoto, Takuya Sakaguchi, Satoru Nogami +1 more | 2022-03-01 |
| 10665465 | Surface treatment method for SiC substrate | Tadaaki Kaneko, Koji Ashida, Yasunori Kutsuma, Satoshi Torimi, Youji Teramoto +2 more | 2020-05-26 |
| 10665485 | Heat treatment vessel for single-crystal silicon carbide substrate and etching method | Satoshi Torimi, Norihito Yabuki, Satoru Nogami | 2020-05-26 |
| 10522386 | Susceptor and method for manufacturing same | Yoshihisa Abe, Satoru Nogami | 2019-12-31 |
| 10388536 | Etching method for SiC substrate and holding container | Satoshi Torimi, Youji Teramoto, Norihito Yabuki, Satoru Nogami, Tadaaki Kaneko +2 more | 2019-08-20 |
| 9764992 | Silicon carbide-tantalum carbide composite and susceptor | — | 2017-09-19 |