Issued Patents All Time
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10665465 | Surface treatment method for SiC substrate | Tadaaki Kaneko, Koji Ashida, Yasunori Kutsuma, Satoshi Torimi, Masato Shinohara +2 more | 2020-05-26 |
| 10665485 | Heat treatment vessel for single-crystal silicon carbide substrate and etching method | Satoshi Torimi, Masato Shinohara, Satoru Nogami | 2020-05-26 |
| 10388536 | Etching method for SiC substrate and holding container | Satoshi Torimi, Masato Shinohara, Youji Teramoto, Satoru Nogami, Tadaaki Kaneko +2 more | 2019-08-20 |
| 10014176 | SiC substrate treatment method | Satoshi Torimi, Satoru Nogami | 2018-07-03 |
| 9991175 | Method for estimating depth of latent scratches in SiC substrates | Satoshi Torimi, Satoru Nogami | 2018-06-05 |
| 9704733 | Storing container, storing container manufacturing method, semiconductor manufacturing method, and semiconductor manufacturing apparatus | Satoshi Torimi, Satoru Nogami | 2017-07-11 |
| 9644894 | Semiconductor device manufacturing apparatus | Satoshi Torimi, Satoru Nogami | 2017-05-09 |
| 9570306 | Surface treatment method for single crystal SiC substrate, and single crystal SiC substrate | Satoshi Torimi, Satoru Nogami | 2017-02-14 |