Aluminum nitride substrate manufacturing method, aluminum nitride substrate, and method of removing strain layer introduced into aluminum nitride substrate by laser processing

Assignee

• Kwansei Gakuin Educational Foundation
• Toyo Aluminium
• Toyota

Inventors

• Tadaaki Kaneko (44 patents)
• Daichi Dojima (10 patents)
• Moeko Matsubara (3 patents)
• Yoshitaka Nishio (58 patents)

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