Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Carbon dopant gas and co-flow for implant beam and source life performance improvement

Carbon dopant gas and co-flow for implant beam and source life performance improvement

US Patent 10354877 · Granted Jul 16, 2019

Estimated economic value: $9,806,000 ⓘ

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Metal-organic-framework-containing bodies and related methods2025
Metal-organic-framework-containing bodies and related methods2025
Gas storage systems and method thereof2025
Method and systems useful for producing aluminum ions2025
Method and systems useful for producing aluminum ions2025
Method and systems useful for producing aluminum ions2025
Method and systems useful for producing aluminum ions2025
Storage and delivery veseel for storing GeH4, using a zeolitic adsorbent2025
Systems and methods for storing molecular diborane2024
Method and systems useful for producing aluminum ions2024
Method and systems useful for producing aluminum ions2024
Method and systems useful for producing aluminum ions2024