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Home › Chucks and clamps for holding objects of a lithographic apparatus and methods for controlling a temperature of an object held by a clamp of a lithographic apparatus

Chucks and clamps for holding objects of a lithographic apparatus and methods for controlling a temperature of an object held by a clamp of a lithographic apparatus

US Patent 10324383 · Granted Jun 18, 2019

Estimated economic value: $23,157,000 ⓘ

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