Electrostatic chuck having thermally isolated zones with minimal crosstalk

Assignee

• Applied Materials

Inventors

• Vijay D. Parkhe (143 patents)
• Konstantin Makhratchev (29 patents)
• Jason Della Rosa (2 patents)
• Hamid Noorbakhsh (53 patents)
• Brad L. Mays (19 patents)
• Douglas A. Buchberger, Jr. (121 patents)

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