Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › High aspect ratio selective lateral etch using cyclic passivation and etching

High aspect ratio selective lateral etch using cyclic passivation and etching

US Patent 10276398 · Granted Apr 30, 2019

Estimated economic value: $78,523,000 ⓘ

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Vapor cleaning of substrate surfaces2025
Display device and driving method thereof2025
Display device and method for displaying an image thereon2025
Substrate processing system including dual ion filter for downstream plasma2025
Display driving integrated circuit with temperature compensation and adaptive sc2025
Method of manufacturing metal product and mold used therefor2025
Probe card2025
Probe head and probe card having same2025
Display device including display panel including plurality of display areas and 2025
Manufacturing method of anodic oxide film structure and anodic oxide film struct2024
Display device including temperature determiner and method of driving the same2024
Predictive display device and driving method thereof2024