Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Lithographic apparatus

Lithographic apparatus

US Patent 10139725 · Granted Nov 27, 2018

Estimated economic value: $14,487,000 ⓘ

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Charge dissipative reticle table cleaning reticle2025
Membrane for EUV lithography2025
Apparatus for assembly of a reticle assembly2025
Methods and patterning devices and apparatuses for measuring focus performance o2025
Transmissive diffusor2025
Inspection apparatus2024
Pellicle and pellicle assembly2024
Pellicle and pellicle assembly2024
Apparatus and method for determining a condition associated with a pellicle2024
Membrane for EUV lithography2023
Mask assembly and associated methods2023
Mask assembly and associated methods2023