Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Substrate support with improved RF return

Substrate support with improved RF return

US Patent 10134615 · Granted Nov 20, 2018

Estimated economic value: $33,309,000 ⓘ

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Shadow ring lift to improve wafer edge performance2025
Process chamber shower head2025
Process chamber manifold2025
Fan mounting system2025
Bottom cover plate to reduce wafer planar nonuniformity2025
Substrate support for a substrate processing chamber2025
Substrate support for a substrate processing chamber2025
Substrate position calibration for substrate supports in substrate processing sy2025
Substrate position calibration for substrate supports in substrate processing sy2025
Substrate position calibration for substrate supports in substrate processing sy2025
Substrate position calibration for substrate supports in substrate processing sy2025
Processing chamber with multiple plasma units2025