Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Projection exposure apparatus with near-field manipulator

Projection exposure apparatus with near-field manipulator

US Patent 10108094 · Granted Oct 23, 2018

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Optical assembly, method for controlling an optical assembly, and projection exp2025
Projection objective including an optical device2025
Curved wafer stage2025
Optical assembly, projection exposure apparatus and method2025
Compensation of creep effects in an imaging device2023
Optical imaging arrangement with a piezoelectric device2023
Optical imaging arrangement with a piezoelectric device2023
Mirror for a microlithographic projection exposure apparatus, and method for ope2021
Method for positioning a component of an optical system2021
Positioning system for a lithographic apparatus2021
Method and device for the correction of imaging defects2021
Mirror, in particular for a microlithographic projection exposure apparatus2021