Issued Patents All Time
Showing 26–30 of 30 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6458496 | Blank for halftone phase shift photomask and halftone phase shift photomask | Toshiaki Motonaga, Takafumi Okamura, Yoshinori Kinase, Hiroshi Mohri, Junji Fujikawa +4 more | 2002-10-01 |
| 5972543 | Phase shift mask and method of producing the same | Koichi Mikami, Chiaki Hatsuda, Hiroshi Mohri | 1999-10-26 |
| 5965301 | Method for repairing photomask by removing residual defect in said photomask | Masami Nara, Tsukasa Abe | 1999-10-12 |
| 5811208 | Phase shift mask and method of producing the same | Koichi Mikami, Chiaki Hatsuda, Hiroshi Mohri | 1998-09-22 |
| 5723234 | Phase shift photomask and phase shift photomask dry etching method | Hiroyuki Miyashita | 1998-03-03 |