Issued Patents All Time
Showing 26–28 of 28 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8816276 | Electron beam writing apparatus and electron beam writing method | Takanao Touya | 2014-08-26 |
| 8188443 | Focusing method of charged particle beam and astigmatism adjusting method of charged particle | Kenji Ohtoshi, Hitoshi Sunaoshi, Osamu Iizuka | 2012-05-29 |
| 8008631 | Method of acquiring offset deflection amount for shaped beam and lithography apparatus | Kenji Ohtoshi, Osamu Iizuka, Shunji Shinkawa | 2011-08-30 |