Issued Patents All Time
Showing 26–29 of 29 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5623343 | Exposure method and apparatus | Kei Nara, Masamitsu Yanagihara | 1997-04-22 |
| 5617211 | Exposure apparatus | Kei Nara, Toshio Matsuura, Muneyasu Yokota, Yukio Kakizaki, Yoshio Fukami +1 more | 1997-04-01 |
| 5602620 | Scanning exposure apparatus and exposure method | Kei Nara, Masami Seki, Masamitsu Yanagihara | 1997-02-11 |
| 5435892 | Process for separating methanol and methyl acrylate or methyl methacrylate | Yasutaka Nakashima, Toshihiro Satoh, Tadao Ida, Etsuji Sato, Akio Tani | 1995-07-25 |