| 6372591 |
Fabrication method of semiconductor device using ion implantation |
Akira Mineji, Shuichi Saito |
2002-04-16 |
| 6258635 |
Removal of metal contaminants from the surface of a silicon substrate by diffusion into the bulk |
Kousuke Miyoshi |
2001-07-10 |
| 6190976 |
Fabrication method of semiconductor device using selective epitaxial growth |
Tomoko Yasunaga |
2001-02-20 |
| 6017823 |
Method of forming a MOS field effect transistor with improved gate side wall insulation films |
Tomoko Yasunaga, Akira Mineji |
2000-01-25 |
| 6010914 |
Method for manufacturing a semiconductor device |
— |
2000-01-04 |
| 5972785 |
Method for manufacturing a semiconductor device having a refractory metal silicide layer |
Hiroshi Kitajima |
1999-10-26 |
| 5951774 |
Cold-wall operated vapor-phase growth system |
Tohru Aoyama, Tatsuya Suzuki |
1999-09-14 |
| 5894037 |
Silicon semiconductor substrate and method of fabricating the same |
Hiroaki Kikuchi |
1999-04-13 |
| 5858853 |
Method for forming capacitor electrode having jagged surface |
Tatsuya Suzuki, Hideo Kawano, Keiji Shiotani, Masao Mikami |
1999-01-12 |
| 5821158 |
Substrate surface treatment method capable of removing a spontaneous oxide film at a relatively low temperature |
— |
1998-10-13 |
| 5798544 |
Semiconductor memory device having trench isolation regions and bit lines formed thereover |
Shuichi Ohya, Masato Sakao, Yoshihiro Takaishi, Kiyonori Kajiyana, Takeshi Akimoto +1 more |
1998-08-25 |
| 5783257 |
Method for forming doped polysilicon films |
Kazuhide Hasebe, Nobuaki Shigematsu |
1998-07-21 |
| 5773357 |
Method for producing silicon film to bury contact hole |
— |
1998-06-30 |
| 5543347 |
Method of forming silicon film having jagged surface |
Hideo Kawano, Keiji Shiotani, Masao Mikami, Tatsuya Suzuki |
1996-08-06 |
| 5470780 |
Method of fabricating poly-silicon resistor |
— |
1995-11-28 |
| 4992301 |
Chemical vapor deposition apparatus for obtaining high quality epitaxial layer with uniform film thickness |
Fumitoshi Toyokawa, Masao Mikami |
1991-02-12 |