Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6479369 | Shallow trench isolation (STI) and method of forming the same | — | 2002-11-12 |
| 6444549 | Thermal processing of semiconductor devices | Toshiya Hayashi, Kouji Hamada, Naoharu Nishio, Shuichi Saito | 2002-09-03 |
| 6258635 | Removal of metal contaminants from the surface of a silicon substrate by diffusion into the bulk | Seiichi Shishiguchi | 2001-07-10 |
| 5801101 | Method of forming metal wirings on a semiconductor substrate by dry etching | — | 1998-09-01 |
| 5660673 | Apparatus for dry etching | — | 1997-08-26 |