| 8090191 |
Method and apparatus for inspection and fault analysis |
— |
2012-01-03 |
| 7825673 |
Failure analysis method and failure analysis apparatus |
— |
2010-11-02 |
| 7495449 |
Non-destructive testing apparatus and non-destructive testing method |
— |
2009-02-24 |
| 7484883 |
Non-destructive testing apparatus and non-destructive testing method |
— |
2009-02-03 |
| 7250758 |
Inspection method and apparatus using scanning laser SQUID microscope |
— |
2007-07-31 |
| 7173447 |
Method and apparatus for diagnosing fault in semiconductor device |
Masatsugu Yamashita, Kodo Kawase, Masayoshi Tonouchi, Toshihiro Kiwa |
2007-02-06 |
| 6759259 |
Device and method for nondestructive inspection on semiconductor device |
— |
2004-07-06 |
| 6610918 |
Device and method for nondestructive inspection on semiconductor device |
— |
2003-08-26 |
| 6593156 |
Non-destructive inspection method |
— |
2003-07-15 |
| 6444895 |
Device and method for nondestructive inspection on semiconductor device |
— |
2002-09-03 |
| 6320396 |
Parasitic MIM structural spot analysis method for semiconductor device and parasitic MIM structure spot analysis method for silicon semiconductor device |
— |
2001-11-20 |
| 6160407 |
Inspection method and wiring current observation method for semiconductor device and apparatus of the same |
— |
2000-12-12 |
| 6137304 |
Method and device of testing semiconductor integrated circuit chip capable of preventing electron-hole pairs |
— |
2000-10-24 |
| 6084423 |
Method and device of testing a semiconductor integrated circuit chip in which a voltage across the semiconductor integrated circuit chip is detected while an ultrasonic wave beam is projected thereon |
— |
2000-07-04 |
| 6072327 |
Method and device of testing semiconductor integrated circuit chip capable of preventing electron-hole pairs |
— |
2000-06-06 |
| 6066956 |
Inspection method and wiring current observation method for semiconductor device |
— |
2000-05-23 |
| 6028435 |
Semiconductor device evaluation system using optical fiber |
— |
2000-02-22 |
| 5815002 |
Method and device of testing semiconductor integrated circuit chip capable of preventing electron-hole pairs |
— |
1998-09-29 |
| 5804980 |
Method and system for testing an interconnection in a semiconductor integrated circuit |
— |
1998-09-08 |
| 5548211 |
Dynamic fault imaging system using electron beam and method of analyzing fault |
Tohru Tujide, Toyokazu Nakamura |
1996-08-20 |
| 5521516 |
Semiconductor integrated circuit fault analyzing apparatus and method therefor |
Yasuko Hanagama, Toyokazu Nakamura, Tohru Tsujide |
1996-05-28 |
| 5422498 |
Apparatus for diagnosing interconnections of semiconductor integrated circuits |
Yasuko Hanagama, Toyokazu Nakamura |
1995-06-06 |
| 4734754 |
Semiconductor device having improved structure of multi-wiring layers |
— |
1988-03-29 |