Issued Patents All Time
Showing 51–75 of 83 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6317195 | Projection exposure apparatus | — | 2001-11-13 |
| 6312859 | Projection exposure method with corrections for image displacement | — | 2001-11-06 |
| 6310680 | Method of adjusting a scanning exposure apparatus and scanning exposure apparatus using the method | — | 2001-10-30 |
| 6304317 | Projection apparatus and method | Naomasa Shiraishi | 2001-10-16 |
| RE37352 | Projection optical apparatus | Kazuaki Suzuki, Yukio Kakizaki | 2001-09-04 |
| 6169602 | Inspection method and apparatus for projection optical systems | Toshihiko Tsuji | 2001-01-02 |
| 6151122 | Inspection method and apparatus for projection optical systems | Toshihiko Tsuji | 2000-11-21 |
| 6078380 | Projection exposure apparatus and method involving variation and correction of light intensity distributions, detection and control of imaging characteristics, and control of exposure | Nobutaka Magome, Naomasa Shiraishi | 2000-06-20 |
| 5945239 | Adjustment method for an optical projection system to change image distortion | — | 1999-08-31 |
| 5841520 | Exposure apparatus and method that use mark patterns to determine image formation characteristics of the apparatus prior to exposure | — | 1998-11-24 |
| 5798838 | Projection exposure apparatus having function of detecting intensity distribution of spatial image, and method of detecting the same | Toshihiko Tsuji, Tadashi Nagayama | 1998-08-25 |
| 5721608 | Projection exposure method and apparatus | — | 1998-02-24 |
| 5710620 | Projection exposure method and apparatus | — | 1998-01-20 |
| 5677757 | Projection exposure apparatus | Naomasa Shiraishi | 1997-10-14 |
| 5661546 | Projection exposure apparatus and method with changing imaging characteristics and illumination conditions | — | 1997-08-26 |
| 5650840 | Focus detecting method and apparatus | — | 1997-07-22 |
| 5581324 | Thermal distortion compensated projection exposure method and apparatus for manufacturing semiconductors | Tsuneo Miyai, Yuji Imai, Kousuke Suzuki | 1996-12-03 |
| 5424552 | Projection exposing apparatus | Toshihiko Tsuji, Yuji Imai | 1995-06-13 |
| 5404118 | Band pass filter with resonator having spiral electrodes formed of coil electrodes on plurality of dielectric layers | Hisatake Okamura, Teruhisa Tsuru, Ken Tonegawa | 1995-04-04 |
| 5400000 | Band-pass filter having two loop-shaped electrodes | Hisatake Okamura, Masahiro Kasahara, Kenji Ajioka | 1995-03-21 |
| 5382927 | Band-pass filter having two looped-shaped electrodes | Hisatake Okamura, Masahiro Kasahara, Teruhisa Tsuru | 1995-01-17 |
| 5381117 | Resonator having loop-shaped electrode | Hisatake Okamura, Masahiro Kasahara | 1995-01-10 |
| 5351020 | Band-pass filter having three or more loop-shaped electrodes | Hisatake Okamura, Masahiro Kasahara, Ken Tonegawa | 1994-09-27 |
| 5337097 | Projection optical apparatus | Kazuaki Suzuki, Yukio Kakizaki | 1994-08-09 |
| 5300903 | Band-pass filter | Hisatake Okamura | 1994-04-05 |