Issued Patents All Time
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6786222 | Method for removing particles from a semiconductor processing tool | Larry E. Frisa, Scott Kellogg, Grant McEwan, Michael N. Montgomery | 2004-09-07 |
| 6362098 | Plasma-enhanced chemical vapor deposition (CVD) method to fill a trench in a semiconductor substrate | Terry A. Breeden, Michael Tucker, Olivier Vatel, Karl Mautz, Ralf Zedlitz | 2002-03-26 |
| 6290491 | Method for heating a semiconductor wafer in a process chamber by a shower head, and process chamber | Oliver Vatel, Peggy John | 2001-09-18 |
| 6217660 | Method for cleaning a throttle valve and apparatus | Leroy Grant, Oliver Vatel | 2001-04-17 |
| 5405491 | Plasma etching process | Carol M. Gelatos, Leroy Grant | 1995-04-11 |
| 5358615 | Process for forming a sputter deposited metal film | Leroy Grant, Robert W. Fiordalice | 1994-10-25 |