Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6290491 | Method for heating a semiconductor wafer in a process chamber by a shower head, and process chamber | Iraj Shahvandi, Peggy John | 2001-09-18 |
| 6217660 | Method for cleaning a throttle valve and apparatus | Iraj Shahvandi, Leroy Grant | 2001-04-17 |