Issued Patents All Time
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6290491 | Method for heating a semiconductor wafer in a process chamber by a shower head, and process chamber | Iraj Shahvandi, Oliver Vatel | 2001-09-18 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6290491 | Method for heating a semiconductor wafer in a process chamber by a shower head, and process chamber | Iraj Shahvandi, Oliver Vatel | 2001-09-18 |