Issued Patents All Time
Showing 1–17 of 17 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8610033 | Rapid thermal process reactor utilizing a low profile dome | Gary M. Moore, Steven C. Beese | 2013-12-17 |
| 7794667 | Gas ring and method of processing substrates | Gary M. Moore, Aaron David Ingles | 2010-09-14 |
| 6592675 | Rotating susceptor | — | 2003-07-15 |
| 6491435 | Linear robot | Thomas F. Carlos | 2002-12-10 |
| 6475284 | Gas dispersion head | Gary M. Moore | 2002-11-05 |
| 6443618 | Particulate free air bearing and seal | Thomas F. Carlos | 2002-09-03 |
| 6428609 | Exhaust particulate controller and method | Gary M. Moore | 2002-08-06 |
| 6347749 | Semiconductor processing reactor controllable gas jet assembly | Gary M. Moore | 2002-02-19 |
| 6328221 | Method for controlling a gas injector in a semiconductor processing reactor | Gary M. Moore | 2001-12-11 |
| 6310327 | Rapid thermal processing apparatus for processing semiconductor wafers | Gary M. Moore | 2001-10-30 |
| 6213478 | Holding mechanism for a susceptor in a substrate processing reactor | — | 2001-04-10 |
| 6163015 | Substrate support element | Gary M. Moore, Kazutoshi Inoue | 2000-12-19 |
| 6151447 | Rapid thermal processing apparatus for processing semiconductor wafers | Gary M. Moore | 2000-11-21 |
| 5710407 | Rapid thermal processing apparatus for processing semiconductor wafers | Gary M. Moore | 1998-01-20 |
| 5683518 | Rapid thermal processing apparatus for processing semiconductor wafers | Gary M. Moore | 1997-11-04 |
| 5444217 | Rapid thermal processing apparatus for processing semiconductor wafers | Gary M. Moore | 1995-08-22 |
| 4770590 | Method and apparatus for transferring wafers between cassettes and a boat | Jean Benoit Hugues, Lynn Weber, James E. Herlinger, Donald L. Schuman, Gary Yee | 1988-09-13 |