Issued Patents All Time
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 4770590 | Method and apparatus for transferring wafers between cassettes and a boat | Jean Benoit Hugues, Lynn Weber, James E. Herlinger, Katsuhito Nishikawa, Gary Yee | 1988-09-13 |