JH

James E. Herlinger

SG Silicon Valley Group: 1 patents #31 of 97Top 35%
Overall (All Time): #1,636,567 of 4,157,543Top 40%
3
Patents All Time

Issued Patents All Time

Patent #TitleCo-InventorsDate
5997650 Reactor having an array of heating filaments and a filament force regulator David K. Studley, Jerry W. Zimmer 1999-12-07
5833753 Reactor having an array of heating filaments and a filament force regulator David K. Studley, Jerry W. Zimmer 1998-11-10
4770590 Method and apparatus for transferring wafers between cassettes and a boat Jean Benoit Hugues, Lynn Weber, Katsuhito Nishikawa, Donald L. Schuman, Gary Yee 1988-09-13