Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5997650 | Reactor having an array of heating filaments and a filament force regulator | James E. Herlinger, Jerry W. Zimmer | 1999-12-07 |
| 5833753 | Reactor having an array of heating filaments and a filament force regulator | James E. Herlinger, Jerry W. Zimmer | 1998-11-10 |
| 4932358 | Perimeter wafer seal | Ernest Keller | 1990-06-12 |