Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5895596 | Model based temperature controller for semiconductor thermal processors | Kevin Stoddard, Konstantinos Tsakalis | 1999-04-20 |
| 4770590 | Method and apparatus for transferring wafers between cassettes and a boat | Lynn Weber, James E. Herlinger, Katsuhito Nishikawa, Donald L. Schuman, Gary Yee | 1988-09-13 |