Issued Patents All Time
Showing 76–100 of 106 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8648992 | Method for manufacturing thin film capacitor and thin film capacitor obtained by the same | Toshiaki Watanabe, Nobuyuki Soyama, Guillaume Guegan | 2014-02-11 |
| 8501560 | Method for manufacturing thin film capacitor and thin film capacitor obtained by the same | Toshiaki Watanabe, Nobuyuki Soyama, Guillaume Guegan | 2013-08-06 |
| 8383298 | Substrate processing method, manufacturing method of EUV mask, and EUV mask | Masatoshi Terayama | 2013-02-26 |
| 8025732 | Apparatus for processing a substrate | Masamitsu Itoh | 2011-09-27 |
| 8017287 | Development method, method of manufacturing photomask, and method of manufacturing semiconductor device | Masatoshi Terayama | 2011-09-13 |
| 7608368 | Pattern forming method, photomask manufacturing method, semiconductor device manufacturing method, and computer program product | Tooru Shibata, Masato Saito, Masamitsu Itoh | 2009-10-27 |
| 7390365 | Developing method, substrate treating method, and substrate treating apparatus | Masamitsu Itoh, Ikuo Yoneda | 2008-06-24 |
| 7354869 | Substrate processing method, substrate processing apparatus, and semiconductor device manufacturing method | Masamitsu Itoh | 2008-04-08 |
| 7205094 | Coating fluid for printing plates and method of making a printing plate | Yasuharu Suda, Toyoshi Ohto | 2007-04-17 |
| 7138350 | MgO vapor deposition material and method for preparation thereof | Ginjiro Toyoguchi, Yoshirou Kuromitsu | 2006-11-21 |
| 7094522 | Developing method, substrate treating method, and substrate treating apparatus | Masamitsu Itoh, Ikuo Yoneda | 2006-08-22 |
| 7070903 | Coating formulation for printing plate precursor, printing plate precursor, printing press, fabrication process of printing plate, and regeneration process of printing plate | Yasuharu Suda, Hiroshi Tonegawa, Minoru Sueda, Yoshiyuki Tasaka, Yasuhiro Akita +3 more | 2006-07-04 |
| 7001086 | Developing method, substrate treating method, and substrate treating apparatus | Masamitsu Itoh, Ikuo Yoneda | 2006-02-21 |
| 6995104 | Polycrystalline MgO deposition material having adjusted Si concentration | Eung Chul Park, Yoshirou Kuromitsu, Ginjiro Toyoguchi | 2006-02-07 |
| 6978715 | Printing press, and apparatus and process for regenerating printing plate | Yasuharu Suda, Toyoaki Yasui, Toyoshi Ohto | 2005-12-27 |
| 6965125 | Protective film for FPD, vapor deposition material for protective film and its production method, FPD, and manufacturing device for FPD protective film | Yoshirou Kuromitsu | 2005-11-15 |
| 6929903 | Developing method, substrate treating method, and substrate treating apparatus | Masamitsu Itoh, Ikuo Yoneda | 2005-08-16 |
| 6872115 | Blade with comb teeth coated with a compound layer for forming ribs and its production method | Kunio Sugamura, Yoshio Kanda, Ryuji Uesugi, Yoshirou Kuromitsu, Young-Cheul Kang +5 more | 2005-03-29 |
| 6828588 | Protective film for FPD, vapor deposition material for protective film and its production method, FPD, and manufacturing device for FPD protective film | Yoshirou Kuromitsu | 2004-12-07 |
| 6821616 | Protective thin film for FPDS, method for producing said thin film and FPDS using said thin film | Yukiya Yamashita, Yoshirou Kuromitsu | 2004-11-23 |
| 6818373 | Coating fluid for printing plates and method of making a printing plate | Yasuharu Suda, Toyoshi Ohto | 2004-11-16 |
| 6680462 | Heat treating method and heat treating apparatus | Shinichi Ito, Iwao Higashikawa, Akitoshi Kumagae | 2004-01-20 |
| 6550990 | Substrate processing apparatus and processing method by use of the apparatus | Masamitsu Itoh, Shinichi Ito | 2003-04-22 |
| 6495807 | Heat treating method and heat treating apparatus | Shinichi Ito, Iwao Higashikawa, Akitoshi Kumagae | 2002-12-17 |
| 6483083 | Heat treatment method and a heat treatment apparatus for controlling the temperature of a substrate surface | Akitoshi Kumagae, Iwao Higashikawa, Shinichi Ito, Tsunetoshi Arikado, Katsuya Okumura | 2002-11-19 |