Issued Patents All Time
Showing 26–32 of 32 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5223085 | Plasma etching method with enhanced anisotropic property and apparatus thereof | Kenji Kawai, Moriaki Akazawa, Takahiro Maruyama, Hiroshi Morita | 1993-06-29 |
| 5213996 | Method and apparatus for forming interconnection pattern and semiconductor device having such interconnection pattern | — | 1993-05-25 |
| 5147465 | Method of cleaning a surface | Takahiro Maruyama, Hiroshi Morita, Tomoaki Ishida, Kenji Kawai | 1992-09-15 |
| 5110394 | Apparatus for forming interconnection pattern | — | 1992-05-05 |
| 5100504 | Method of cleaning silicon surface | Kenji Kawai | 1992-03-31 |
| 5038013 | Plasma processing apparatus including an electromagnet with a bird cage core | Moriaki Akazawa, Takahiro Maruyama, Hiroshi Morita, Tomoaki Ishida | 1991-08-06 |
| 4877509 | Semiconductor wafer treating apparatus utilizing a plasma | Nobuo Fujiwara, Kenji Kawai, Teruo Shibano, Hiroshi Morita, Kyusaku Nishioka | 1989-10-31 |