Issued Patents All Time
Showing 1–13 of 13 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7927187 | Method of polishing a target surface | Jun Watanabe, Tetsujiro Tada, Takashi Arahata, Jun Tamura, Masaru Sakamoto +1 more | 2011-04-19 |
| 6603163 | Semiconductor device with capacitor and method of manufacturing thereof | Katsunobu Hori, Takeshi Matsunuma, Kenichiro Shiozawa | 2003-08-05 |
| 6586329 | Semiconductor device and a method of manufacturing thereof | Yoshinori Tanaka, Mitsuya Kinoshita, Shinya Watanabe, Tatsuo Kasaoka, Toshiaki Ogawa | 2003-07-01 |
| 6097052 | Semiconductor device and a method of manufacturing thereof | Yoshinori Tanaka, Mitsuya Kinoshita, Shinya Watanabe, Tatsuo Kasaoka, Toshiaki Ogawa | 2000-08-01 |
| 5474615 | Method for cleaning semiconductor devices | Tomoaki Ishida, Kenji Kawai, Takahiro Maruyama, Toshiaki Ogawa | 1995-12-12 |
| 5306671 | Method of treating semiconductor substrate surface and method of manufacturing semiconductor device including such treating method | Toshiaki Ogawa, Hiroshi Morita, Tomoaki Ishida, Kenji Kawai | 1994-04-26 |
| 5302541 | Manufacturing method of a semiconductor device with a trench capacitor | — | 1994-04-12 |
| 5223085 | Plasma etching method with enhanced anisotropic property and apparatus thereof | Kenji Kawai, Takahiro Maruyama, Toshiaki Ogawa, Hiroshi Morita | 1993-06-29 |
| 5218218 | Semiconductor device and manufacturing method thereof | — | 1993-06-08 |
| 5203981 | Vacuum-treatment apparatus | — | 1993-04-20 |
| 5038013 | Plasma processing apparatus including an electromagnet with a bird cage core | Takahiro Maruyama, Toshiaki Ogawa, Hiroshi Morita, Tomoaki Ishida | 1991-08-06 |
| 4982138 | Semiconductor wafer treating device utilizing a plasma | Nobuo Fujiwara, Kenji Kawai, Teruo Shibano, Tomoaki Ishida, Kyusaku Nishioka | 1991-01-01 |
| 4915979 | Semiconductor wafer treating device utilizing ECR plasma | Tomoaki Ishida, Nobuo Fujiwara, Kyusaku Nishioka, Teruo Shibano, Kenji Kawai | 1990-04-10 |