Issued Patents All Time
Showing 51–55 of 55 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5260771 | Method of making semiconductor integrated circuit, pattern detecting method, and system for semiconductor alignment and reduced stepping exposure for use in same | Susumu Komoriya, Takao Kawanabe, Takayoshi Oosakaya, Nobuyuki Iriki | 1993-11-09 |
| 5094539 | Method of making semiconductor integrated circuit, pattern detecting method, and system for semiconductor alignment and reduced stepping exposure for use in same | Susumu Komoriya, Takao Kawanabe, Takayoshi Oosakaya, Nobuyuki Iriki | 1992-03-10 |
| 5025284 | Exposure method and exposure apparatus | Susumu Komoriya, Hiroshi Nishizuka, Hisashi Maejima | 1991-06-18 |
| 4974018 | Exposure method and exposure apparatus | Susumu Komoriya, Hiroshi Nishizuka, Hisashi Maejima | 1990-11-27 |
| 4699505 | Exposure method and exposure apparatus | Susumu Komoriya, Hiroshi Nishizuka, Hisashi Maejima | 1987-10-13 |