Issued Patents All Time
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6265113 | Stress adjustment method of X-ray mask | Hideki Yabe, Kaeko Kitamura, Sunao Aya, Koji Kise | 2001-07-24 |
| 6212252 | X-ray mask provided with an alignment mark and method of manufacturing the same | Koji Kise, Hideki Yabe, Sunao Aya, Kaeko Kitamura, Shigeto Ami | 2001-04-03 |
| 5953492 | Method of manufacturing X-ray mask and heating apparatus | Hideki Yabe, Sunao Aya, Koji Kise, Hiroaki Sumitani, Takashi Hifumi +1 more | 1999-09-14 |
| 5834142 | Method of manufacturing X-ray mask and heating apparatus | Hideki Yabe, Sunao Aya, Koji Kise, Hiroaki Sumitani, Takashi Hifumi +1 more | 1998-11-10 |
| 5677090 | Method of making X-ray mask having reduced stress | Hideki Yabe, Sunao Aya, Koji Kise, Kei Sasaki | 1997-10-14 |
| 5496667 | X-ray mask and its fabrication method | Hideki Yabe, Nobuyuki Yoshioka | 1996-03-05 |