Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6265113 | Stress adjustment method of X-ray mask | Hideki Yabe, Kenji Marumoto, Sunao Aya, Koji Kise | 2001-07-24 |
| 6212252 | X-ray mask provided with an alignment mark and method of manufacturing the same | Koji Kise, Hideki Yabe, Sunao Aya, Kenji Marumoto, Shigeto Ami | 2001-04-03 |
| 5905005 | X-ray mask and method of fabricating the same | Hideki Yabe, Kei Sasaki | 1999-05-18 |
| 5879840 | Film-forming method for X-ray mask | Hideki Yabe, Masao Kouhashi, Masamitsu Okamura, Kei Sasaki | 1999-03-09 |