Issued Patents All Time
Showing 1–12 of 12 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10043635 | Ion implantation apparatus | — | 2018-08-07 |
| 9188872 | Method for manufacturing semiconductor device | Shozo Shikama, Hideaki Yuki | 2015-11-17 |
| 9093361 | Semiconductor device | Shiro Hino, Naruhisa Miura, Akihiko Furukawa, Yukiyasu Nakao, Tomokatsu Watanabe +3 more | 2015-07-28 |
| 9063428 | Method for manufacturing semiconductor device | Hideaki Yuki, Shozo Shikama | 2015-06-23 |
| 9059086 | Method of manufacturing semiconductor device | Yuji Ebiike, Takahiro Nakatani, Hiroshi Watanabe, Yoshio Fujii, Yoshiyuki Nakaki +2 more | 2015-06-16 |
| 8252672 | Silicon carbide semiconductor device comprising silicon carbide layer and method of manufacturing the same | Tomokatsu Watanabe, Naruhisa Miura, Keiko Sakai, Shohei Yoshida, Toshikazu Tanioka +3 more | 2012-08-28 |
| 6265113 | Stress adjustment method of X-ray mask | Hideki Yabe, Kaeko Kitamura, Kenji Marumoto, Koji Kise | 2001-07-24 |
| 6212252 | X-ray mask provided with an alignment mark and method of manufacturing the same | Koji Kise, Hideki Yabe, Kaeko Kitamura, Kenji Marumoto, Shigeto Ami | 2001-04-03 |
| 6190808 | X-ray mask and method of manufacturing the same | Koji Kise, Takaaki Murakami | 2001-02-20 |
| 5953492 | Method of manufacturing X-ray mask and heating apparatus | Hideki Yabe, Kenji Marumoto, Koji Kise, Hiroaki Sumitani, Takashi Hifumi +1 more | 1999-09-14 |
| 5834142 | Method of manufacturing X-ray mask and heating apparatus | Hideki Yabe, Kenji Marumoto, Koji Kise, Hiroaki Sumitani, Takashi Hifumi +1 more | 1998-11-10 |
| 5677090 | Method of making X-ray mask having reduced stress | Kenji Marumoto, Hideki Yabe, Koji Kise, Kei Sasaki | 1997-10-14 |