Issued Patents All Time
Showing 1–11 of 11 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7350406 | Sensor chip breaking strength inspection apparatus and sensor chip breaking strength inspection method | Yuichi Sakai, Yoshitatsu Kawama, Munehito Kumagai, Yasuyuki Nakaoka | 2008-04-01 |
| 6898267 | X-ray mask | Hiroshi Watanabe, Kouji Kise | 2005-05-24 |
| 6265113 | Stress adjustment method of X-ray mask | Kaeko Kitamura, Kenji Marumoto, Sunao Aya, Koji Kise | 2001-07-24 |
| 6212252 | X-ray mask provided with an alignment mark and method of manufacturing the same | Koji Kise, Sunao Aya, Kaeko Kitamura, Kenji Marumoto, Shigeto Ami | 2001-04-03 |
| 6110291 | Thin film forming apparatus using laser | Kenyu Haruta, Koichi Ono, Hitoshi Wakata, Mutsumi Tsuda, Yoshio Saito +22 more | 2000-08-29 |
| 5953492 | Method of manufacturing X-ray mask and heating apparatus | Kenji Marumoto, Sunao Aya, Koji Kise, Hiroaki Sumitani, Takashi Hifumi +1 more | 1999-09-14 |
| 5905005 | X-ray mask and method of fabricating the same | Kaeko Kitamura, Kei Sasaki | 1999-05-18 |
| 5879840 | Film-forming method for X-ray mask | Kaeko Kitamura, Masao Kouhashi, Masamitsu Okamura, Kei Sasaki | 1999-03-09 |
| 5834142 | Method of manufacturing X-ray mask and heating apparatus | Kenji Marumoto, Sunao Aya, Koji Kise, Hiroaki Sumitani, Takashi Hifumi +1 more | 1998-11-10 |
| 5677090 | Method of making X-ray mask having reduced stress | Kenji Marumoto, Sunao Aya, Koji Kise, Kei Sasaki | 1997-10-14 |
| 5496667 | X-ray mask and its fabrication method | Kenji Marumoto, Nobuyuki Yoshioka | 1996-03-05 |