Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5953492 | Method of manufacturing X-ray mask and heating apparatus | Hideki Yabe, Kenji Marumoto, Sunao Aya, Koji Kise, Hiroaki Sumitani +1 more | 1999-09-14 |
| 5834142 | Method of manufacturing X-ray mask and heating apparatus | Hideki Yabe, Kenji Marumoto, Sunao Aya, Koji Kise, Hiroaki Sumitani +1 more | 1998-11-10 |
| 5057766 | Apparatus for detecting position of charged particle | Shuhei Nakata, Takafumi Nakagawa | 1991-10-15 |