Issued Patents All Time
Showing 26–39 of 39 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5629114 | Phase shift mask and manufacturing method thereof and exposure method using phase shift mask comprising a semitransparent region | Akihiko Isao, Ryoichi Kobayashi, Nobuyuki Yoshioka, Yaichiro Watakabe | 1997-05-13 |
| 5595938 | Method of manufacturing semiconductor device | — | 1997-01-21 |
| 5593801 | Attenuating type phase shifting mask, method of manufacturing thereof and semiconductor device manufactured by using the mask | Nobuyuki Yoshioka | 1997-01-14 |
| 5579112 | Optical tomographic imaging equipment having a light source unit for generating a light wave having a predetermined coherence length | Yuiti Sugiyama | 1996-11-26 |
| 5474864 | Phase shift mask and manufacturing method thereof and exposure method using phase shift mask | Akihiko Isao, Ryoichi Kobayashi, Nobuyuki Yoshioka, Yaichiro Watakabe | 1995-12-12 |
| 5464713 | Phase shift mask and method for repairing a defect of a phase shift mask | Nobuyuki Yoshioka, Kunihiro Hosono | 1995-11-07 |
| 5429897 | Attenuating type phase shifting mask and method of manufacturing thereof | Nobuyuki Yoshioka | 1995-07-04 |
| 5427876 | Method of manufacturing a photomask | Hitoshi Nagata | 1995-06-27 |
| 5415951 | Method of manufacturing a photomask comprising a phase shifter with a stepped edge | — | 1995-05-16 |
| 5328786 | Photomask and method of manufacturing the same | Hitoshi Nagata | 1994-07-12 |
| 5290647 | Photomask and method of manufacturing a photomask | Hitoshi Nagata | 1994-03-01 |
| 5254418 | Method of manufacturing photomask | Kazuya Kamon, Hitoshi Nagata | 1993-10-19 |
| 4434658 | Ultrasonic wave tomographic imaging system | Hirohide Miwa, Takaki Shimura | 1984-03-06 |
| 4413520 | Ultrasonic imaging apparatus | Keiichi Murakami, Shinichi Amemiya, Tadahiko Yanashima, Atsuo Iida, Takaki Shimura +2 more | 1983-11-08 |