Issued Patents All Time
Showing 26–33 of 33 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6432591 | Overlay target design method with pitch determination to minimize impact of lens aberrations | Pary Baluswamy | 2002-08-13 |
| 6423474 | Use of DARC and BARC in flash memory processing | — | 2002-07-23 |
| 6417076 | Automated combi deposition apparatus and method | Ziad R. Hatab, David Q. Wright | 2002-07-09 |
| 6403285 | Method for exposing semiconductor wafers in a manner that promotes radial processing uniformity | Linda K. Somerville | 2002-06-11 |
| 6335531 | Modification of resist and/or resist processing with fluorescence detection | Linda K. Somerville, Kenneth Somerville | 2002-01-01 |
| 6281100 | Semiconductor processing methods | Zhiping Yin, Ravi Iyer, Thomas R. Glass, Ardavan Niroomand, Linda K. Somerville +1 more | 2001-08-28 |
| 6274292 | Semiconductor processing methods | Zhiping Yin, Tom Glass | 2001-08-14 |
| 6107002 | Reducing resist shrinkage during device fabrication | Ardavan Niroomand | 2000-08-22 |